Effect of Pulsed Laser Annealing on Optical and Structural Properties of ZnO:Eu Thin Film

ZnO:Eu thin film fabricated by pulsed laser deposition was treated by pulsed UV laser. The effect of laser fluence from 70 to 125 mJ cm−2 on film properties was investigated. The results showed that the surface morphology was clearly modified and the film treated at laser fluence of 70 mJ cm−2 was more densified compared to the other annealed films. Laser treatment led to a reduction of carbon content and to a stoichiometric ZnO:Eu composition on the surface. Refractive index significantly decreased and extinction coefficient was blue shifted for higher laser fluences. Strong characteristic Eu3+ transitions were obtained using excitation at 266 nm. The highest photoluminescence intensity was observed for the annealed film at a laser fluence of 70 mJ cm−2. The influence of ambient composition (N2 and O2) and temperature (room temperature and 150 °C) to photoluminescence response was examined for optical gas sensor application. The laser-untreated film showed higher sensitivity to the presence of oxygen at both temperatures compared to the treated film. The stability of photoluminescence intensity at elevated temperature was improved for laser-treated areas.