Pump-Probe Imaging of Integrated Circuits

Abstract We present a new method of imaging integrated circuits (ICs) using a dual-laser scanning confocal microscope. In this method we introduce physical and/or functional changes to the integrated circuit using the first ‘pump’ laser and then image the response of the circuit using the second ‘probe’ laser. We propose several novel applications of this imaging method. Specifically, we show how to image the flow of injected charge carriers and use the derived images to improve the resolution of material interfaces. We also show how to image changes to activity and laser voltage-probed waveforms and use the information to discover electrical connections between logic cells.