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Surface micromachining technology of micro electromechanical system ( MEMS) is compatible with IC technology, which can realize the accurate control of the pressure sensor's sensitive structure size,and can be used to improve the overload ca-pacity of the sensor.Based on the linear static analysis and nonlinear contact analysis of finite element simulation,the stress distribu-tion on pressure sensitive film was presented,then the relationship was characterized between sizes of the film and overload capacity of the sensor.At last a method was proposed to improve overload capacity of the sensor.By the method,the sensitive structure size was optimized and the overload capacity was improved significantly without the increasing of process steps and the production cost.