NOVELTY - Displacement interferometer has a light source for generating a light beam, and a beam splitter (111) for dividing the light beam into a reference beam and a measuring beam. A displacement converter (121) alters a progressing direction of the measuring beam, and transforms a displacement perpendicular to the progressing direction of the measuring beam into a path difference of the measuring beam.
USE - For use in a displacement interferometer system (claimed), that is utilized in the field of fine industries including operating works of exposure, diamond turning, and precision processing work, for measuring displacement of a target object.
ADVANTAGE - The displacement converter transforms the displacement perpendicular to the progressing direction of the measuring beam into the path difference of the measuring beam, thus enabling to measure displacements of the target objects without requiring a large mirror, so that it is easier to retain uniform optical characteristics, thereby preventing degradation in accuracy of measuring due to reduction in the surface uniformity on the measuring mirror.
DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for;
(i) A displacement interferometer system, comprising a light source for generating a light beam; and
(ii) An exposure system including two of the above interferometers.
DESCRIPTION OF DRAWING(S) - The drawing shows the above displacement interferometer.
Light source (100)
beam splitter (111)
Displacement converter (121)
Detector (131)
Reference mirror (141)
