More than 10 years experience in micro-nano fabrication for silicon photonics. Has successfully created the FIRST silicon photonics prototype service in Australia, which now is part of Australian Silicon Photonics services. Skilled in Electron-beam lithography (Raith 150, Vistec EBPG 5000, Nabity EBL), RIE-ICP etching, PECVD, E-beam evaporating, Sputtering, Surface Plasmon Resonance, Scanning Electron Microscopy, AFM, and so on.