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排名必读论文期刊顶会热点AI 简史溯源树小脉星探人才迁徙塔尖人才国防情报追踪开源工具智慧手语
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论文共 9 篇作者统计合作学者相似作者

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Progress on EUV-source development, tool integration and applications
Rainer Lebert,Bernhard Jagle, Christian Wies,Uwe Stamm,Juergen Kleinschmidt, Kai Gaebel,Guido Schriever, Joseph Pankert,Klaus Von Bergmann,Willi Neff,Andre Egbert
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) (2005): 230-243
引用6浏览0引用
6
0
High Power Sources Of Euv Lithography - State Of The Art
U Stamm,J Kleinschmidt, K Gabel, H Birner,I Ahmad, D Bolshukhin, J Brudermann, Td Chinh, F Flohrer, S Gotze, G Hergenhan, D Klopfel,
HIGH-POWER LASER ABLATION V, PTS 1 AND 2 (2004): 722-736
引用7浏览0引用
7
0
EUV source power and lifetime: the most critical issues for EUV lithography
Uwe Stamm,Juergen Kleinschmidt, Kai Gaebel, Henry Birner,Imtiaz Ahmad, Denis Bolshukhin,Jesko Brudermann,Tran Duc Chinh,Frank Flohrer, Sven Goetze,Guido Hergenhan,Diethard Kloepfel,
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) (2004): 133-144
引用18浏览0引用
18
0
Radiation source with high average EUV radiation output
Imtiaz Ahmad,Juergen Kleinschmidt, Guido Schriever, Uwe Stamm, Sven Goetze
mag（2004）
引用33浏览0引用
33
0
Extreme ultraviolet sources and measurement tools for EUV-lithography and system development
Kai Gaebel,Juergen Kleinschmidt,Guido Schriever,Uwe Stamm,Rainer Lebert, Max Christian Schuermann
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) (2003): 256-264
引用5浏览0引用
5
0
High-power EUV sources for lithography: a comparison of laser-produced plasma and gas-discharge-produced plasma
Uwe Stamm,Imtiaz Ahmad,V M Borisov,Frank Flohrer, Kai Gaebel, Sven Goetze,Alexander S Ivanov,O B Khristoforov,Diethard Kloepfel,Peter Koehler,Juergen Kleinschmidt, Vladimir Korobotchko,
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) (2002): 122-133
引用32浏览0引用
32
0
High Power Gas-Discharge And Laser-Plasma Based Euv Sources
F Flohrer, K Gabel, D Klopfel, P Kohler,I Ahmad, S Gotze,J Kleinschmidt, V Korobotchko, J Ringling, G Schriever, U Stamm
GAS AND CHEMICAL LASERS AND INTENSE BEAM APPLICATIONS III（2002）
引用0浏览0引用
0
0
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