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2007 Cleantech Conference and Trade Show Cleantech 2007pp.122-125, (2019)
lt;/tex></formula> and <formula formulatype="inline"><tex Notation="TeX">$\hbox{NH}_{3}lt;/tex></formula> Plasma Surface Treatments on High-Performance LTPS-TFT With High-<formula formulatype="inline"><tex Notation="TeX">$\kappalt;/tex></formula> Gate Dielectric">Impacts of $\hbox{N}_{2}$ and $\hbox{NH}_{3}$ Plasma Surface Treatments on High-Performance LTPS-TFT With High-$\kappa$ Gate Dielect..
Woei-Cherng Wu,Chao-Sung Lai, Shih-Ching Lee,Ming-Wen Ma,Tien-Sheng Chao,Jer-Chyi Wang, Chih-Wei Hsu,Pai-Chi Chou,Jian-Hao Chen,Kuo-Hsing Kao,Wen-Cheng Lo,Tsung-Yi Lu,
2008 IEEE International Electron Devices Meeting (2008)