Svetlana B Radovanov

Institute of Physics, PO Box 86, 11080 Zemun, Beograd, Yugoslavia

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Papers47 papers

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Extraction of positive and negative ion beams from large area plasma sources

S Radovanov, A Samolov, D Distaso

PLASMA PHYSICS AND CONTROLLED FUSION, no. 1 (2019): 014031

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Etching of Niobium in an Argon-Chlorine Capacitively Coupled Plasma

Svetlana Radovanov, Ana Samolov,Janardan Upadhyay, Jeremy Peshl,Svetozar Popovic,L. Vuskovic

Bulletin of the American Physical Society, (2016)

Bibtex

Comparison of surface vacuum ultraviolet emissions with resonance level number densities. II. Rare-gas plasmas and Ar-molecular gas mixtures

John B Boffard,Chun C Lin,Shicong Wang,A E Wendt, Cody Culver,Svetlana B Radovanov,Harold Persing

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, no. 2 (2015)

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Chemically active species in an Oxygen Inductively Coupled Plasma

Nathaniel Ly,John B. Boffard, Chun Lin,A. E. Wendt,Svetlana Radovanov, Harold Persing,Alexandre Likhanskii

Bulletin of the American Physical Society, (2015)

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System and method for plasma control using boundary electrode

Svetlana B Radovanov, Ludovic Godet, Tyler B Rockwell, C Campbell

(2014)

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Comparison of surface vacuum ultraviolet emissions with resonance level number densities. I. Argon plasmas

John B Boffard,C C Lin, Cody Culver,Shicong Wang,A E Wendt,Svetlana B Radovanov,Harold Persing

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, no. 2 (2014)

Cited by2Bibtex

TECHNIQUES AND APPARATUS FOR HIGH RATE HYDROGEN IMPLANTATION AND CO-IMPLANTION

Svetlana B Radovanov, Ludovic Godet,Anthony Renau, Xianfeng Lu

(2014)

Cited by1Bibtex

Method of ionization

Svetlana B Radovanov, Ludovic Godet,Christopher Hatem

(2014)

Bibtex

Optical emission study of ion composition in an inductively coupled oxygen plasma

Nathaniel Ly,John B. Boffard,Chun C. Lin,A. E. Wendt,Svetlana Radovanov, Harold Persing,Alexandre Likhanskii

Bulletin of the American Physical Society, (2014)

Bibtex

Noninvasive, real-time measurements of plasma parameters via optical emission spectroscopy

Shicong Wang,A E Wendt,John B Boffard,Chun C Lin,Svetlana B Radovanov,Harold Persing

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, no. 2 (2013)

Cited by9Bibtex

Vacuum ultraviolet photon fluxes in argon-containing inductively coupled plasmas

Svetlana Radovanov, Harold Persing,Shicong Wang, C.L. Culver,John B. Boffard, Chun C. Lin,A. E. Wendt

Bulletin of the American Physical Society, (2013)

Bibtex

System and method for manipulating an ion beam

Frank Sinclair, Victor M Benveniste,Svetlana B Radovanov, James Buff

(2013)

Cited by1Bibtex

Ion energy distributions measured inside a high-voltage cathode in a BF3 pulsed dc plasma used for plasma doping: experiments and ab initio calculations

Ludovic Godet,Svetlana B Radovanov, Jay Sheuer,C Cardinaud,N Fernandez,Yves Ferro,G Cartry

PLASMA SOURCES SCIENCE & TECHNOLOGY, no. 6 (2012)

Cited by1Bibtex

Cross sections and transport properties of positive ions in BF 3 plasmas

Vladimir D Stojanovic,Z M Raspopovic, Jelena Jovanovic,Svetlana B Radovanov,ž Nikitovic,Z Lj Petrovic

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and ..., (2012): 151-154

Cited by6Bibtex

Measurements and modeling of electron energy distributions in the afterglow of a pulsed discharge in BF3

ž Nikitovic,Svetlana B Radovanov, Ludovic Godet,Z M Raspopovic,O Sasic,V Stojanovic,Z Lj Petrovic

EPL, no. 4 (2011)

Cited by4Bibtex

Rate Coefficients for Ion Production by Electrons and Ions in BF3 Gas

Vladimir M. Stojanovic,Zeljka Nikitovic,Zoran Raspopovic,Jasmina Jovanovic,Svetlana Radovanov,Zoran Petrovic

Bulletin of the American Physical Society, (2011)

Bibtex

MOLECULAR ION GENERATION

Ludovic Godet,Svetlana B Radovanov,Christopher Hatem

(2011)

Cited by1Bibtex

Modeling of Electron Kinetics in BF3

Z. Nikitovic,O. Sasic,Z. Raspopovic,V. Stojanovic,S. Radovanov,M. Mozetic,U. Cvelbar

ACTA PHYSICA POLONICA A, no. 5 (2010): 748-751

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Energetic Charged Particle Collisions in Electronegative Plasmas

Svetlana Radovanov,Ludovic Godet,Timothy Miller, Nicholas Chamberlain,George D. Papasouliotis

Bulletin of the American Physical Society, (2010)

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PLASMA PROCESSING APPARATUS

Ludovic Godet, Timothy J Miller,Svetlana B Radovanov, Anthony Renau, Vikram Singh

(2010)

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Svetlana B RadovanovBinding

Papers47 papers

Svetlana B Radovanov