Senior Engineer
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微纳结构制造工艺开发和工艺流程及版图设计、大型工艺平台运行管理
Papers

Patents
Pressure gauge chip structure and preparation method thereof
YANG FANG,WANG WEI,ZHANG DACHENG,HUANG XIAN,HE JUN,ZHANG LI,LI TING,LUO KUI,WANG YING,JIANG BOYAN
Application Date: 20151209
Method for representing surface roughness of silicon wafer through utilization of current value
杨芳,张大成,何军,张立,刘鹏,王玮,李婷,罗葵,田大宇
Application Date: 20150902
Method for micro anchor leg torsion bonding strength by using thermal driving
何军,张大成,张立,杨芳,刘鹏,王玮,李婷,罗葵,田大宇
Application Date: 20150721
Method and system for extracting beam etching verticality
何军,张大成,张立,杨芳,刘鹏,王玮,李婷,罗葵,田大宇
Application Date: 20150721
何军,张大成,张立,王玮,杨芳,田大宇,刘鹏,李婷
Application Date: 20150312
Piezo-resistance type pressure meter chip structure and preparation method thereof
黄贤,杨芳,张大成,姜博岩,王玮,何军,田大宇,刘鹏,罗葵,李婷,张立
Application Date: 20150206
Chip structure of pressure gauge and manufacturing method of chip structure
黄贤,王玮,张大成,姜博岩,杨芳,何军,田大宇,刘鹏,罗葵,李婷,张立
Application Date: 20150206
Piezoresistive pressure meter chip structure and preparation method thereof
黄贤,刘鹏,张大成,姜博岩,王玮,何军,田大宇,杨芳,罗葵,李婷,张立
Application Date: 20150115
Electronic beam spot measuring method and device
刘鹏,张大成,王玮,田大宇,杨芳,罗葵,戴小涛,李婷,王颖,李静,时广轶
Application Date: 20140904
Method for detecting roughness of etched side walls through capacitance changes
张立,何军,张大成,黄贤,赵丹淇,王玮,杨芳,田大宇,刘鹏,李婷,罗葵
Application Date: 20140728
Wafer-level vacuum packaging method of bulk silicon resonant pressure transducer
何军,张大成,黄贤,张立,赵丹淇,王玮,杨芳,田大宇,刘鹏,李婷,罗葵
Application Date: 20140515
赵丹淇,张大成,何军,黄贤,杨芳,田大宇,刘鹏,王玮,李婷,罗葵
Application Date: 20140508
Method for detecting depth of etched groove through current change
张立,何军,张大成,黄贤,赵丹淇,王玮,杨芳,田大宇,刘鹏,李婷,罗葵
Application Date: 20140428
Method and device for detecting quality of etched surface by adopting breaking strength of surface
HE JUN,ZHANG DACHENG,HUANG XIAN,ZHANG LI,ZHAO DANQI,WANG WEI,YANG FANG,TIAN DAYU,LIU PENG,LI TING,LUO KUI
Application Date: 20140327
Novel silicon based super-capacitor and preparation method thereof
张立,张大成,何军,黄贤,赵丹淇,林琛,王玮,杨芳,田大宇,刘鹏,李婷,罗葵
Application Date: 20130411
赵丹淇,张大成,何军,黄贤,杨芳,田大宇,刘鹏,王玮,李婷,罗葵
Application Date: 20130114
Self-packaged MEMS (micro-electro-mechanical systems) device and infrared sensor
赵丹淇,张大成,何军,黄贤,杨芳,田大宇,刘鹏,王玮,李婷,罗葵
Application Date: 20130114
Method for enhancing bonding strength of SOG (silicon on glass) process microstructure
何军,张大成,黄贤,赵丹淇,林琛,王玮,杨芳,田大宇,刘鹏,李婷,罗葵
Application Date: 20121129
黄贤,张大成,赵丹淇,林琛,何军,杨芳,田大宇,刘鹏,王玮,李婷,罗葵
Application Date: 20121129