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论文共 5 篇作者统计合作学者相似作者

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Global Tilt Extraction for BEOL Contact Landing Displacement Control
Yung-Yi Lin, Tien-Jung Lee, Hsiao-Fei Su, Yen-Hung Liu, Chao-Yu Cheng, Christopher Liman, Boxue Chen,Zhengquan Tan,Yuan-Chieh Chiu, Chiung-Kun Huang, Ying-Hung Liang,Hong-Ji Lee, Nan-Tzu Lian
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII (2024)
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Enable In-Die Overlay Measurement on DRAM Storage Node by Line Scan Self-Calibration Method
June Yeh, Sam Tsai, Cheng An Lin, Cheng Wei Yang, Kai Ping Chan, Cheng Ta Cheng, Foster Huang, Henry Chen, Cheng-Hang Yang, York Yang, Peter Paquet,Houssam Chouaib,Zhengquan Tan
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII (2024)
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Novel Ellipsometry Metrology-Based Machine Learning Technique for Low Sensitivity Characterization of Critical Dimensions Within Gate-All-around Transistors
Houssam Chouaib, Valeria Dimastrodonato, Anderson Chou, Agostino Cangiano, Andrew Cross, Derrick Shaughnessy,Zhengquan Tan, Daniel Schmidt,Curtis Durfee,Shanti Pancharatnam,Julien Frougier,Andrew Greene, Mary Breton
Metrology, Inspection, and Process Control XXXVIII (2024)
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Global Tilt Measurement on Irregular PIL Supporting Patterns in 3D NAND Memory
Yung-Yi Lin, Tien-Jung Lee, Hsiao-Fei Su, Yen-Hung Liu, Chao-Yu Cheng, Christopher Liman, Boxue Cen,Zhengquan Tan, Ming-Tsung Wu, Min-Hsuan Huang,Yao-Yuan Chang,Hong-Ji Lee, Nan-Tzu Lian
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII (2024)
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作者统计

#Papers: 3

#Citation: 0

H-Index: 0

G-Index: 0

Sociability: 3

Diversity: 0

Activity: 0

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