Automated Nanomanufacturing System to Assemble Carbon Nanotube Based Devices

In this paper we report the design and implementation of a novel automated manufacturing system for carbon nanotube (CNT)-based nanodevices, which integrates a new dielectrophoretic (DEP) microchamber into a robotic-based deposition workstation. The microchamber has been fabricated to separate and select CNTs with the desired electronic property by using DEP force. Moreover, a series of tools for mass-producing consistent nanodevices has been developed with the CNT deposition workstation, such as computer-controllable micromanipulators and a micro-active nozzle. Detailed experimental studies of the CNT separation and deposition processes have been performed on both single-walled carbon nanotubes (SWCNTs) and multi-walled carbon nanotubes (MWCNTs). Preliminary results show that CNTs could be manipulated to multiple pairs of microelectrodes repeatedly. Consistent I-V characteristics and CNT formations of the fabricated devices were obtained. The yield of semi-conducting CNTs was also increased by using our system. Therefore, by using the proposed CNT separation and deposition system, CNT-based nanodevices with specific and consistent electronic properties can be manufactured automatically and effectively.