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Effects of Ultra-Violet Laser Irradiation on Graphene

Microelectronic engineering(2012)

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摘要
Graphene can be applied for transparent electrodes instead of indium tin oxide (ITO). For patterning of ITO, the maskless laser process was reported as a simple and fast process. Raman spectra and electrical resistances of graphene were measured before and after ultra-violet laser irradiation to investigate the possibility of maskless laser process. The Raman spectrum was affected by laser irradiation (>3MW/cm2), indicating defects generation. The resistance was more sensitive to laser irradiation than the Raman spectrum.
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关键词
Graphene,Maskless laser process,Ultra-violet laser
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