Effects of Ultra-Violet Laser Irradiation on Graphene
Microelectronic engineering(2012)
摘要
Graphene can be applied for transparent electrodes instead of indium tin oxide (ITO). For patterning of ITO, the maskless laser process was reported as a simple and fast process. Raman spectra and electrical resistances of graphene were measured before and after ultra-violet laser irradiation to investigate the possibility of maskless laser process. The Raman spectrum was affected by laser irradiation (>3MW/cm2), indicating defects generation. The resistance was more sensitive to laser irradiation than the Raman spectrum.
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关键词
Graphene,Maskless laser process,Ultra-violet laser
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