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Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution

OPTICS LETTERS, no. 5 (2008): 518-520

Cited by: 94|Views4
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Abstract

We have demonstrated near-wavelength resolution microscopy in the extreme ultraviolet. Images of 50 nm diameter nanatubes were obtained with a single similar to 1 ns duration pulse from a desktop-size 46.9 run laser. We measured the modulation transfer function of the microscope for three different numerical aperture zone plate objectives...More

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