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Integrating Optics And Micro-Mechanics In A Single Substrate: A Step Toward Monolithic Integration In Fused Silica.
OPTICS EXPRESS, no. 17 (2005): 6635-6644
We present a novel optical sensor concept that merges integrated optics and micro-mechanics in a monolithic substrate. This concept pushes microsystems integration and defines a new class of monolithic optical microsystems where only optical signals are processed. As an illustration, we present a high-precision, monolithic, glass-based, m...More
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