A novel negative photoinitiator-free photosensitive polyimide

A novel negative photoinitiator-free photosensitive polyimide (PFPS–PI) was synthesized through introducing the photosensitive 4,4-bis[(4-amino)thiophenyl] benzophenone (BATPB) into backbone chain and methyl acrylate group into side-chain of the polyimide, respectively. Photosensitive properties study revealed its good photolithographic properties, with a resolution about 5μm and a sensitivity of 150mJ/cm2.