Static And Dynamic Aspects Of An Air-Gap Capacitor
SENSORS AND ACTUATORS A-PHYSICAL, no. 2 (1992): 121-128
EI
摘要
This paper deals with the theory of an air-gap capacitor used as a micromechanical resonator. Both static and dynamic aspects are discussed. A single-element approach for the electrostatic excitation and capacitive detection of the vibrational motion of the resonators is described. The non-linear character of the electrostatic force is ac...更多
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