Low-temperature Nonpressurized Sintering and Performance of High-purity Er_2O_3 Target Material

High-purity Er2O3 ceramic target material of about 90% relative density was prepared by low-temperature nonpressurized sintering at 1 450 ℃ and with Er2O3nanopowders as its raw material.The target materials prepared with Er2O3 nanopowders of various shape were analyzed from their fracture appearance and density.The results show that the target material prepared by low-temperature nonpressurized sintering and with three-dimensionally subsphaeroidal Er2O3nanopowders as its raw material has the optimal performance.