Patterned heteroepitaxial SiGe thin films through UV Excimer Laser radiationS. Chiussi,F. Gontad,J. C. Conde,E. Martin,A. Benedetti,C. Serra,J. Serra,P. González,B. Leónmsra(2010)引用 22|浏览4暂无评分关键词thin filmAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要