Formation of macrodefects in SiC physical vapor transport growth Edward Kyle Sanchez,Volker D. Heydemann, Tom Kuhr,Gregory S. Rohrer, Marek ShowronskiJournal of Electronic Materials（1999）引用 23|浏览2暂无评分关键词sic physical vapor transportAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
