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Sensitivity of a Lamb wave sensor with 2μm AlN membrane

ULTRASONICS, no. SUPnan (2006): E893-E897

Cited by: 31|Views13
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Abstract

Anti-symmetrical Lamb wave mode A(0) presents a large sensitivity to mass loading and can be used in contact with liquids with a small attenuation. The advantages of this system are the possibility to get a large mass sensitivity. The sensitivity increases when the thickness of membrane decreases. Therefore the problem is to obtain thin p...More

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