Structure of ultra-thin diamond-like carbon films grown with filtered cathodic arc on Si(001).

ANALYTICAL SCIENCES, no. SP2 (2010): 267-272

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Abstract:

The structure of 3 nm and 15 nm diamond-like carbon films, grown on Si(001) by filtered cathodic arc, was studied by angle-resolved X-ray photoelectron spectroscopy (ARXPS) and transmission electron microscopy (TEM). The ARXPS data was deconvolved by employing simultaneous-fitting, which allowed for a clear deconvolution of the Si 2p and ...More

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