Self-Assembled Ingan Quantum Dots On Gan Emitting At 520 Nm Grown By Metalorganic Vapor-Phase Epitaxy
JOURNAL OF CRYSTAL GROWTH(2008)
摘要
Self-assembled InGaN quantum dots (QDs) have been grown using metalorganic vapor-phase epitaxy (MOVPE), without using anti-surfactant. Using 120s annealing, InGaN QDs have been successfully formed with a circular base diameter of 40 nm and an average height of 4 nm, with QDs density of 4 x 10(9)cm(-2). The InGaN QDs have peak photoluminescence (PL) wavelengths of 519 and 509 nm for samples without and with a GaN upper barrier, respectively. The full-width half-maximum (FWHM) of the PL spectra ranges from 56.6 up to 69.6 nm. These results demonstrates that high In-content InGaN QDs can be grown by MOVPE, and can potentially be utilized as the active media for light-emitting diodes (LEDs) and semiconductor laser diodes for green emission. (C) 2008 Elsevier B.V. All rights reserved.
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关键词
low-dimensional structures, nanostructures, metalorganic chemicalvapor deposition, nitrides, semiconducting III-V materials
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