On the coarse/fine dual-stage manipulators with robust perturbation compensator

ICRA, no. 1 (2001): 121-126vol.1

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A dual-stage, fast and fine robotic manipulator is presented. By adopting merits of both coarse and fine actuator, a desirable system having the capacity of large workspace with high resolution of motion is enabled. We constructed an ultra precision XY-manipulator with dual-stage structure where the PZT driven fine stage is mounted on the...更多

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