Lateral homogeneity of YBa2Cu3O7−δ films by Auger electron spectroscopy

Andrea Gauzzi,Manuel Bauer,Davor Pavuna,Nicolaos Xanthopoulos,Hans Jörg Mathieu,Francesca Licci

Materials Letters（1992）

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摘要

The composition of ion beam sputtered YBa2Cu3O7−σ films has been determined by Auger electron spectroscopy to be “1-2-3” within the experimental resolution all over a deposition area of ≈ 10 cm diameter. This result and local compositional analysis with lateral resolution of ≈ 1 μm have been correlated with surface microstructure and electrical resistivity measurements.

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auger electron spectroscopy

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