Chloride Ion Detection by InN Gated AlGaN/GaN High Electron Mobility Transistors

Chu Byung-Hwan, Lin Hon-Way,Gwo Shangjr,Wang Yu-Lin,Pearton S. J.,Johnson J. W.,Rajagopal P.,Roberts J. C.,Piner E. L.,Linthicum K. J.,Ren Fan

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena（2010）

Cited 13|Views29

Key words

aluminium compounds,biosensors,chemical sensors,chlorine,gallium compounds,high electron mobility transistors,III-V semiconductors,indium compounds,pH measurement,radiocommunication,semiconductor thin films,wide band gap semiconductors

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