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AlN/silicon Lamb-wave microsensors for pressure and gravimetric measurements

Sensors & Actuators: A. Physical, no. 1 (1995): 179-182

Cited by: 29|Views5
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Abstract

We have studied a pressure and a gravimetric sensor using an AlN film over a silicon membrane. The membrane is micromachine using both anisotropic and isotropic chemical etching. The AlN thin film is deposited by the sputtering method. Elastic waves are generated and detected through interdigital transducers (IDTs) calculated at the frequ...More

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