Milliwatt-class non-polar a-plane InGaN/GaN light-emitting diodes grown directly on r-plane sapphire substrates

Current Applied Physics(2010)

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摘要
Non-polar a-plane (112¯0) light-emitting diodes (LEDs) in InGaN/GaN multiple quantum well structures were successfully fabricated by metal organic chemical vapor deposition (MOCVD) directly grown on r-plane (11¯20) sapphire substrates. The full width at half maximums (FWHMs) of the X-ray rocking curve (XRC) of an a-plane GaN template along the c- and m-axes were measured to be ∼349 and ∼533arcsec, respectively. The optical output power and external quantum efficiency (EQE) at drive currents of 20mA and 100mA under direct current operation in on-wafer measurements were 1.24mW, 2.4% and 100mA, 1.7%, respectively. The a-plane LED showed 2.8nm blue shift with change in drive current from 5mA to 100mA. The polarization ratio at room temperature was 0.4 and it indicates that the a-plane LED has polarization anisotropy.
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关键词
Non-polar,a-Plane,InGaN,Light-emitting diode,r-Plane sapphire,X-ray diffraction
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