2GHz 2Mb 2T Gain-Cell Memory Macro with 128GB/s Bandwidth in a 65nm Logic Process
San Francisco, CA(2008)
摘要
As silicon technology scales, the possibility of fabricating dense memories is of great interest, particularly if the solution has low to no additional process cost. We demonstrate a 2Mb 2T gain-cell macro with 128GB/s bandwidth, fast 2ns cycle time, operating at 2GHz in a native 65nm logic process. Fast read access and cycle times are critical in lookup applications such as tag RAMs in microprocessors where read queries are abundant. In such a scenario replacing SRAM with a denser fast memory is desired. The 2T fully pipelined gain-cell macro features non-destructive read, partial-write support and sustains 8-cycle successive access to the same memory bank. The macro is fabricated in a high-performance 65nm process featuring 1.2nm nitrided gate oxide, 35nm gate length, enhanced channel strain, NiSi silicide, 8 layers of Cu metal interconnect, and low-K ILD enabling data-buses from the memory banks to run as high as 2GHz. This technology has a 0.57 mum2 6T SRAM cell. All internal circuits of the macro operate with a logic-compatible nominal IV supply with the exception of wordline drivers.
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关键词
SRAM chips,logic design,2T fully pipelined gain-cell macro,2T gain-cell memory macro,6T SRAM cell,cycle times,frequency 2 GHz,logic process,lookup applications,memory bank,nitrided gate oxide,read access time,silicon technology,size 65 nm,storage capacity 2 Mbit,time 2 ns,wordline drivers
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