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Evaluation of liquid properties using a silicon lamb wave sensor

Sensors & Actuators: A. Physical, no. 1 (1994): 175-180

被引用44|浏览5
EI
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The design and realization of a Lamb wave oscillator sensor system are described. Both the oscillation frequency and the amplifier gain level are monitored, giving information about the Lamb wave velocity and amplitude, respectively. The system is fabricated in two separate silicon chips (hybrid set-up) or in one chip (monolithic set-up),...更多

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