Early prediction of product performance and yield via technology benchmark
CICC（2008）
摘要
This paper presents a practical method to estimate IC product performance and parametric yield solely from a well-chosen set of existing electrical measurements intended for technology monitoring at an early stage of manufacturing. We demonstrate that the components of mmWave PLL and product-like logic performance in a 65 nm SOI CMOS technology are predicted within a 5% RMS error relative to mean.
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关键词
process monitoring,cmos integrated circuits,integrated circuit technology,ic product yield,integrated circuit manufacture,ic product performance,mmwave pll,ic technology monitoring,phase locked loops,silicon-on-insulator,ic manufacturing,soi cmos technology,integrated circuit yield,product-like logic performance,millimetre wave devices,rms error,electrical measurements,ic technology benchmark,silicon on insulator,estimation,testing
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