Preparation Of (Pb,La)Tio3 Films By Metal Organic Chemical Vapor Deposition With New Lanthanum Precursors

Thin films of (Pb, La)TiO3 were grown with three new trialkylphosphine oxide adducts of lanthanum tris-tetramethylheptanedione with the general formula La(thd)(3)(RR'R(3) '' PO)(n) where thd = tetramethylheptanedione, (CH3)(3)CCOCHCOC(CH3)(3); R = R' = R '' = CH3; R = R' = CH3, R '' = C4H9; R = R' = R '' = C4H9. The new precursors were compared with La(thd), and were evaluated for volatility, thermal stability, ease of transport and La incorporation into a (Pb, La)TiO3 film.