Characterization of d.c.-sputtered amorphous hydrogenated silicon films by optical and nuclear methodsA. Cachard,A.M. Bouchoux,J.N. Massot,J. TardyTHIN SOLID FILMS(1982)引用 1|浏览2暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要