Growth mode and interface structure of Ag on the HF-treated Si(111):H surface
SURFACE SCIENCE(1996)
摘要
A growth mode and interface structure analysis has been performed for Ag deposited at a high temperature of 300 degrees C on the HF-treated Si(111):H surface by means of medium-energy ion scattering and elastic recoil detection analysis of hydrogen. The measurements show that Ag grows in the Volmer-Weber mode and that the Ag islands on the surface are epitaxial with respect to the substrate. The preferential azimuthal orientation is A-type only when Ag is deposited slowly. The interface does not reconstruct to the root 3x root 3-Ag structure, which is normally observed for Ag deposition above 200 degrees C on the Si(111)7 x 7 surface, but retains its bulk-like structure. The presence of hydrogen at the interface is demonstrated after deposition of thick (1100 Angstrom) Ag films. However, the amount of hydrogen at the interface is not a full monolayer. This partial desorption of hydrogen from the interface explains why the Schottky barrier heights of Ag/Si(111):H diodes are close to those of Ag/Si(111)7 x 7 and Ag/Si(111)2 x 1.
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关键词
epitaxy,medium energy ion scattering (MEIS),metal-semiconductor interfaces,Schottky barrier,silicon,silver
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