Evaluation Of (Pb, La)(Zr, Ti)O-3 (Plzt) Capacitors Of Different Film Thicknesses With Pt/Srruo3 Top Electrodes

(Pb, La)(Zr, Ti)O-3 [PLZT] films with thicknesses of 150, 225 and 300 nm were prepared by chemical solution deposition (CSD) on Pt/IrO2 coated SiO2/Si wafers. Top electrodes of Pt/SRO were sputter deposited and annealed at 600 degrees C to form a capacitor. All three PLZT films were highly (111) oriented and showed high switchable polarization of >40 mu C.cm(-2) at 200 kV.cm(-1). A coercive field of 40 kV.cm(-1) was observed for all three films regardless of thickness. Little fatigue degradation was observed up to 10(10) cycles. These results indicate that it is possible to combine both oxide and metallic contacts in a high endurance ferroelectric capacitor for low voltage applications.