Defect and Stress Control of AlGaN for Fabrication of High Performance UV Light Emitters

H Amano,A Miyazaki,K IIda,T Kawashima,M Iwaya,S Kamiyama,I Akasaki,R Liu,A Bell,FA Ponce, S Sahonta, A Cherns

Physica status solidi A, Applied research（2004）

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摘要

This paper reviews the recent development of group III AlGaN-based UV light emitters. Critical issues with respect to the development of high-performance devices are discussed. (C) 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

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