PROPERTIES OF DIAMONDLIKE CARBON FILMS DEPOSITED ON SILICON, QUARTZ AND GLASS SUBSTRATES USING LASER PLASMA DEPOSITION

V. Goncharov,D. Ismailov,S. Petrov,M. Puzyrou

msra（2007）

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摘要

Investigation of diamondlike carbon films using Raman spectroscopy method has showed, that deposited coatings according to substrate material can show graphite, nanocrystalline carbon or amorphous diamondlike carbon films' properties with the content of sp3 hybridized carbon atoms of ~20 %.

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关键词

diamond like carbon,raman spectroscopy

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