Preparation of potassium tantalate thin films through chemical solution deposition

Journal of the European Ceramic Society(2004)

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摘要
Potassium tantalate (KT) KTaO3 thin films of both pyrochlore and perovskite cubic structures were prepared through the chemical solution deposition (CSD). A homogeneous and stable precursor solution was obtained from potassium iso-butoxide and tantalum iso-butoxide in absolute iso-butanol with an additive of diethanolamine as a stabilizer. The effects of K:Ta sol stoichiometry, type of substrate (both amorphous, and single crystal substrates), type of buffer interlayer [Al2O3, Y-stabilized ZrO2(YSZ), PbTiO3, PbTiO3–Al2O3 composite, KNbO3 (KN)], and annealing regime on the kinetics of pyrochlore to perovskite transition has been studied. KT perovskite films have been successfully prepared on (100)MgO, and (0001)Al2O3. Using SiO2 and Si substrates, perovskite films have been obtained via insertion of Al2O3 and KNbO3 buffer layers.
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关键词
Chemical solution deposition,Films,Tantalates,X-ray methods
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