Lithium Ion Implantation Effects in MgO (100)
Materials Science Forum(2001)
摘要
Single crystals of MgO (100) were implanted with 10(16) (6)Li ions cm(-2) at an energy of 30 keV. After ion implantation the samples were annealed isochronally in air at temperatures up to 1200K. After implantation and after each annealing step, the defect evolution was monitored with optical absorption spectroscopy and depth-sensitive Doppler Broadening Positron Beam Analysis (PBA). A strong increase in the S-parameter is observed in the implantation layer at a depth of approximately 100 nm. The high value of the S-parameter is ascribed to positron annihilation in small lithium precipitates. The results of 2D-ACAR and X-TEM analysis show evidence of the presence of lithium precipitates. The depth distribution of the implanted (6)Li atoms was monitored with Neutron Depth Profiling (NDP). It was observed that detrapping and diffusion of (6)Li starts at an annealing temperature of 1200K.
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关键词
ion implantation,lithium,MgO,NDP,positron annihilation
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