Theory of paraxial lateral aberrations of electrostatic imaging electrostatic electron optics based on asymptotic solutions and its verification

Optik（2011）

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摘要

In imaging electron optics, study of geometrical lateral aberrations of third order and paraxial lateral aberrations of second order has traditionally been paid more attention to, but the existence of paraxial chromatic aberrations of third order and paraxial chromatic aberrations of magnification of third order was almost ignored, and the general form of paraxial lateral aberration has not been studied theoretically.

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关键词

Electron optical imaging systems,Electrostatic cathode lenses,Aberration theory of electron optics,Paraxial lateral aberrations,Paraxial chromatic aberration of magnification

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