A high-precision optical metrology system for determining the thickness of birefringent wave plates
Optics and Lasers in Engineering(2007)
摘要
This study develops a non-destructive measurement system for determining the thickness and refractive indices of birefringent optical wave plates. Compared to previous methods presented in the literature, the proposed metrology system provides the ability to measure the thickness of the birefringent optical plate in high-precision. The results show that for a commercially available birefringent optical wave plate with refractive indices of ne=1.5518, n0=1.5427 and a thickness of 452.1428μm, the experimentally determined value for the error in the wave plate thickness measurement is just 0.046μm. The measurement resolution of the proposed system exceeds that of the interferometer hardware itself. The proposed method provides a simple yet highly accurate means of measuring the principal optical parameters of birefringent glass wave plates.
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关键词
Laser interferometer,Optical path,Refractive index,Thickness measurement,Birefringence
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