A high-precision optical metrology system for determining the thickness of birefringent wave plates

Yen-Liang Yeh

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Yen-Pin Lin

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Kuang-Sheng Chen

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Optics and Lasers in Engineering, pp. 1094-1098, 2007.

Cited by: 4|Views5

Keywords:

Laser interferometerOptical pathRefractive indexThickness measurementBirefringence

Abstract:

This study develops a non-destructive measurement system for determining the thickness and refractive indices of birefringent optical wave plates. Compared to previous methods presented in the literature, the proposed metrology system provides the ability to measure the thickness of the birefringent optical plate in high-precision. The re...More

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