Design of Porosity Level for Porous Si₃N₄ Ceramics Manufactured by Nitriding and Post-Sintering of Si Powder Compact

Prediction of porosity level for the Si3N4 filter substrate manufactured by reaction bonding of Si compact and subsequent post-sintering was attempted and its validity was verified by comparison between calculation and measurement. Both arc well matched in the specimens of as-nitrided and low temperature post-sintering, while few percents higher measurement in high temperature post-sintered specimens resulted from weight loss during the process.