Fabrication of ZnO Thin Film Transistors Based on the Substrate of Glass

X. Yang,C. Wang,C. Zhao,W. Tang,X. Gao,J. Yang, B. Liu,X. Qi,G. Du,J. Cao

ADVANCES IN LIQUID CRYSTALS（2010）

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摘要

In our paper, we induced the process of ZnO based thin film transistors (ZnO-TFTs) fabricated on the substrate of glass. The photolithographic plate designed for using in the ZnO-TFT devices fabrication process was shown in our paper. The ZnO-TFT devices were fabricated successfully, the I-on/off ratio is similar to 10(4).

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关键词

Fabrication,Photolithography,ZnO,Thin film transistors

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