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Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator.
NANO LETTERS, no. 2 (2011): 791-797
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摘要
Sensitive transduction of the motion of a micro-scale cantilever is central to many applications in mass, force, magnetic resonance, and displacement sensing. Reducing cantilever size to nanoscale dimensions can improve the bandwidth and sensitivity of techniques like atomic force microscopy, but current optical transduction methods suffe...更多
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