Measurement of electron temperature and plasma density in coplanar AC plasma display panels

Surface and Coatings Technology(2003)

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摘要
The electron temperature and plasma ion density in coplanar alternating-current plasma display panels are experimentally investigated by a micro-Langmuir probe and high speed discharge images in this experiment. It is observed from the experiment that the electron temperature, obtained from both the micro-Langmuir probe and high speed camera, decreases from 1.8 to 0.9 eV as the pressure of the neon gas increases from 150 to 350 Torr. It is noted that the measured electron temperatures from the micro-Langmuir probe and high speed camera are in good agreement with each other within a 5% error margin. The plasma ion density at the lateral distance of 125 μm from the center of the sustaining electrode gap has been found to decrease from 3.7×1011 to 2.3×1011 cm−3, as the gas pressure increases from 150 to 350 Torr.
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关键词
AC plasma display panel,Electron temperature,Plasma ion density,Micro-Langmuir probe
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