Correlation of stress-induced leakage current with generated positive trapped charges for ultrathin gate oxide

Electron Devices, IEEE Transactions, Volume 45, Issue 2, 1998, Pages 567-570.

Cited by: 6|Views0


In this work, the evidence of the stress-induced leakage current related to the stress-generated positive trapped charges is presented and investigated. It is shown that the centroid of the positive trapped charges, which depends on the polarity of the stress current, affects the magnitude of the leakage current. The trapping density of p...More



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