Analysis of thickness dependence on the electrical properties of tin dioxide films in the presence of LPG gas

Journal of Alloys and Compounds(2010)

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摘要
Chloride-based inorganic salt was used to prepare multiple layered tin dioxide thin films by sol–gel method. The deposited films were subjected to SEM, XRD and optical studies. Carrier concentrations of the multiple layered films were studied. A comparative analysis of both undoped and Pd-doped SnO2 multilayered films has been done in the presence of LPG gas to investigate the possibility of their usage as LPG gas sensors.
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关键词
Thin films,Sol–gel processes,X-ray diffraction
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