Size Reduction of Tunable Micromachined Filters for Fast Wavelength Tuning

Takeru Amano,Tomoyuki Hino,Wiganes Janto,Masakazu Arai,Fumio Koyama

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS（2004）

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摘要

We present the design and fabrication of a micromachined GaAs/AlGaAs filter for fast wavelength tuning. The size reduction of tunable micromachined filters is carried out to increase the speed of wavelength tuning. We fabricated micromachined filters having a miniature filter structure with an air gap of 300 nm and a short cantilever of 45 pm length, and exhibiting a fast response time of below 2.5 mus.

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关键词

optical MEMS,tunable filter,cantilever,high speed,air gap

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