Preparation and infrared characterization of potassium tantalate thin films

Journal of the European Ceramic Society(2005)

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摘要
Potassium tantalate KTaO3, (KT) thin films of perovskite structure were prepared by chemical solution deposition (CSD) on Si and SiO2 glass substrates. Potassium and tantalum isobutoxides were dissolved in absolute isobutanol with an addition of diethanolamine as a modifier to obtain a homogeneous and stable precursor solution. Optimum conditions for film preparation were found. Annealing temperature and heating regime, Al2O3 “chemical” buffer layer and KNbO3 seeding layer were the determining factors of the film quality. It was demonstrated by X-ray diffraction (XRD) that the films have the desired cubic perovskite structure. The infrared transmittance spectrum of the films shows three minima corresponding to optical active phonons in the perovskite crystal structure. Their positions are in agreement with the bulk material, except the 14cm−1 shift of the lowest phonon, which has been also observed in other perovskite materials. The temperature dependence of the phonon parameters has been studied too.
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关键词
Films,Spectroscopy,Tantalates,Chemical solution deposition
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