Vaporization of a mixed precursor in chemical vapor deposition of YBCO films

Gang Zhou,Guangyao Meng,Roger L. Schneider,Bimal K. Sarma,Moises Levy

Journal of Superconductivity（1995）

引用 6|浏览4

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摘要

Single-phase YBa2Cu3O7-d thin films withTc values around 90 K are readily obtained by using a single-source chemical vapor deposition technique with normal precursor mass transport. The quality of the films is controlled by adjusting the carrier gas flow rate and the precursor feed rate.

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关键词

thin film,alkaline earth metal,copper,mass transport,physical properties,superconductors,x ray diffraction

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