Soft Magnetic Nano-Strings Simultaneously Grown And Sculpted On Si Micro-Cantilevers
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS(2010)
摘要
Si micro-cantilevers, MCTVS, were coated by off-normal deposition with Co soft magnetic films that had a nano-string surface morphology. This nano-structure generated an in-plane uniaxial magnetic, electrical and optical anisotropy in the films. The width of the nano-strings was controlled between 8 and 30 nm by selecting the off-normal deposition parameters. Two sets of coated MCTV were produced: ones with nano-strings parallel to the longitudinal symmetry axis of the MCTV and the other ones with the nano-strings perpendicular to this axis. The morphological anisotropy present in the Co film was also reflected in a mechanical anisotropy in the MCTVS. For MCTVS coated with longitudinal nanostrings, the frequency of the mechanical resonance decreased approximate to 1.5% with respect to the non-coated ones, while it decreased approximate to 3% for coated MCTVS with transversal nano-strings. This was explained in terms of the anisotropic elastic properties of the Co films. The extra changes of the frequency of the mechanical resonance produced by a magnetic field applied to the MCTV were discussed in considering also the magnetic anisotropy of the films. (C) 2009 Elsevier B.V. All rights reserved.
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关键词
Nanoscale pattern formation, Soft magnetic film, Micro-cantilever, Anisotropy, Laser deposition
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